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Vacuum microelectronics
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This feature is a large variety of closely intertwined components. Quantum mechanics, dynamics of charged particles, chemistry, semiconductor physics, surface engineering, all these fields make up the whole, which was called vacuum microelectronics. This is the fruit of two, at first glance, competing fields of electronics - vacuum devices and semiconductor microelectronics.
It was the manufacturing techniques developed for semiconductors that proved to be an excellent means of stimulating the development of vacuum devices.
Exhaustion of the possibility of further significant progress, first in vacuum electronics, then also in semiconductors, and new user requirements caused a gradual increase in interest in vacuum microelectronics.
Table of Contents
Preface
List of markings
1. Introduction
2. The physical basis of electron emission
3. Field mission
4.Other types of emissions
5. Field emitters
6. Work conditions of field emitters
7. Field emitter noise
8. Vision cameras
9. Microwave lamps
10. Field emission sensors
Summary.
Literature.
Index.
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