Analysis and Design Principles of MEMS Devices

Sensors and actuators are now in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems, mechanical actuators and micro electronic circuits. A variety of MEMS devices have been developed, and are widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, d such mechaning beaming structuresrag micrag. Using practical examples, the design and the problems of the book. The ideal advanced level textbook for graduates, Analysis and Design. Principles of MEMS. Devices are a suitable source of reference for researchers and engineers in the field.

* Presents the analysis and design principles of MEMS devices more systematically than ever before.

* Includes the theories. MEMS includes the dynamics of micro mechanical structures

* A problem section is included in the end of the book.

Chapter 1. Introduction to MEMS devices

Chapter 2. Basic mechanics of beam and diaphragm structures

Chapter 3. Air Damping

Chapter 4. Electrostatic Actuation

Chapter 5. Capacitive Sensing and Effects of Electrical Excitation

Chapter 6. Piezoresistive Sensing