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New products
New products
Analysis and Design Principles of MEMS Devices
Free shipping
free shipping in Poland for all orders over 500 PLN
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If your payment will be credited to our account by 11:00
14 days for return
Each consumer can return the purchased goods within 14 days
* Presents the analysis and design principles of MEMS devices more systematically than ever before.
* Includes the theories. MEMS includes the dynamics of micro mechanical structures
* A problem section is included in the end of the book.
Chapter 1. Introduction to MEMS devices
Chapter 2. Basic mechanics of beam and diaphragm structures
Chapter 3. Air Damping
Chapter 4. Electrostatic Actuation
Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
Chapter 6. Piezoresistive Sensing
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