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Diamond Films
ID: 171748
Koji Kobashi
- Discusses the most advanced techniques for diamond growth
- Assists diamond researchers in deciding on the most suitable process conditions
- Inspires readers to devise new CVD (chemical vapor deposition
Ever since the early 1980s, and the discovery of the diamond research film, the hetero-projectal growth and the diamond research community. Kobashi has documented such discussions with the help of chemical vapour disposition. Kobashi provides information about the nature of oriented and heteroepitaxial growth of diamond films.
1. Overview of Oriented Growth
2. Diamond - Structure and CVD Growth
3. Microwave Plasma CVD Reactors
4. Other CVD Reactors
5. Crystal Orientations and Film Surface Morphology
6. Formation of Twins
7. Homoepitaxial Growth
8. Surface Reconstruction
9. Epitaxial Growth on cBN, Ni, and Other Substrates
10. Diamond Nucleation
11. HOD Film Growth
12. Oriented Growth on Noble Metals
13. Properties and Applications of Heteroepitaxial Diamond Films
14. Conclusion
Appendices
- Notations and units
- Plasma
- Properties of diamond and other semiconducting materials
- Reconstruction of diamond surfaces
- Materials constants
- Phase diagrams of carbon and metals
- Carbon solubilities in metals
- Biasing and growth conditions for diamond growth
171748
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