Handbook of Silicon Based MEMS Materials and Technologies

A comprehensive guide to MEMS materials, and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include:

• Silicon as MEMS material


• Material properties and measurement techniques


• Analytical methods used in materials characterization


• Modeling in MEMS


• Measuring MEMS


• Micromachining technologies in MEMS


• Encapsulation of MEMS components


• Emerging process technologies, including ALD and porous silicon

Written by 73 world class MEMS contributors from around the globe, a volume of micromachining, the implementation of design processes. It also provides a comprehensive reference for R & D and academic communities.

• Veikko Lindroos is Professor of Physical Metallurgy and Materials at Helsinki University of Technology, Finland.


• Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland.


• Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.


• Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.

. Provides vital packaging technologies and process for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques
. Shows how to protect your organization and the costs
. Discusses properties, preparation, and growth of silicon crystals and wafers
. Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (incl. Focused beam techniques), and multiscale modeling methods of MEMS structures

Silicon as MEMS Material; Modeling in MEMS; Measuring MEMS; Micromachining Technologies in MEMS; Encapsulation of MEMS Components