• Out-of-Stock
Handbook of Silicon Based MEMS Materials and Technologies
search
  • Handbook of Silicon Based MEMS Materials and Technologies
ID: 172770
Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
Delivery date unknown

A comprehensive guide to MEMS materials, and manufacturing, examining the state of the art with a particular emphasis on current and future applications.


Key topics covered include:




  • Silicon as MEMS material

  • Material properties and measurement techniques

  • Analytical methods used in materials characterization

  • Modeling in MEMS

  • Measuring MEMS

  • Micromachining technologies in MEMS

  • Encapsulation of MEMS components

  • Emerging process technologies, including ALD and porous silicon



Written by 73 world class MEMS contributors from around the globe, a volume of micromachining, the implementation of design processes. It also provides a comprehensive reference for R & D and academic communities.



  • Veikko Lindroos is Professor of Physical Metallurgy and Materials at Helsinki University of Technology, Finland.

  • Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland.

  • Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.

  • Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.


. Provides vital packaging technologies and process for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques
. Shows how to protect your organization and the costs
. Discusses properties, preparation, and growth of silicon crystals and wafers
. Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (incl. Focused beam techniques), and multiscale modeling methods of MEMS structures

Silicon as MEMS Material; Modeling in MEMS; Measuring MEMS; Micromachining Technologies in MEMS; Encapsulation of MEMS Components
172770

Other products in the same category (16)